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Model Number
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Specifications
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Power/Output
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Features
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APR 250/260/262
Compact Piezo Gauges.
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*Range: 1X10-1~1100 mbar,2x10-1~2200 mbar (262).
*Temp.:
80℃(Bakeout)
10~60℃(Operating)
-40~70℃(Storage)
*Sensor cable length: 50m
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*Supply: 13~30 VDC, 0.2 W.
*Output Signal:
1~9.8 V (Pressure range)
0.4 V(Sensor error below)
10 k0hm (Minimum load)
*Flange: DN 16 ISO-KF,DN 16 CF-F, G 1/4”.
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*Absolute pressure measurement, independent of gas type.
*High accuracy from 1 mbar to 50 bar.
*Corrosion resistant.
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Model Number
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Specifications
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Power/Output
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Features
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APR 265/266/267
Compact Piezo Gauges.
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*Range:
1~5500 mbar(265)
1~11000 mbar(266)
5~55000 mbar(267)
*Temp.:
80℃(Bakeout)
10~60℃(Operating)
-40~70℃(Storage)
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*Supply: 13~30 VDC, 0.2 W
*Output Signal:
1~9.8 V (Pressure range)
0.4 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 50m
*Fitting: G 1/4”
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*Absolute pressure measurement, independent of gas type.
*High accuracy from 1 mbar to 50 bar.
*Corrosion resistant.
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Model Number
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Specifications
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Power/Output
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Features
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CMR261/262
CMR263/264
Compact Capacitance Diaphragm Gauges
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*Temperature compensated.
*Range:
1x10-1~1100 mbar(261)
1x10-2~110 mbar(262)
1x10-3~11 mbar(263)
1x10-4~1.1 mbar(264)
*Temp.:
65℃(Bakeout)
5~50℃(Operating)
-40~65℃(Storage)
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*Supply: 18~30 VDC. 1.8W
*Output Signal:
1~9.8 V (Pressure range)
0.4 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 120m
*Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.
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*Absolute pressure measurement, independent of gas type.
*Excellent long-term and temperature stability.
*Minimal zero drift.
*Corrosion-resistant alumina construction.
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Model Number
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Specifications
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Power/Output
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Features
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CMR271/272/273
Compact Capacitance Diaphragm Gauges
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*Temperature controlled: 45℃.
*Range:
1x10-1~1100 mbar(271)
1x10-2~110 mbar(272)
1x10-3~11 mbar(273)
*Temp.:
65℃(Bakeout)
15~40℃(Operating)
-40~65℃(Storage)
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*Supply: 18~30 VDC. 7.5W
*Output Signal:
1~9.8 V (Pressure range)
0.4 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 65m
*Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.
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*Absolute pressure measurement, independent of gas type.
*Excellent long-term and temperature stability.
*Minimal zero drift.
*Corrosion-resistant alumina construction.
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Model Number
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Specifications
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Power/Output
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Features
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CMR274/275
Compact Capacitance Diaphragm Gauges
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*Temperature controlled: 45℃.
*Range:
1x10-4~1.1mbar(274)
1x10-5~0.11mbar(275)
*Temp.:
65℃(Bakeout)
15~40℃(Operating)
-40~65℃(Storage)
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*Supply: 18~30 VDC. 7.5W
*Output Signal:
1~9.8 V (Pressure range)
0.4 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 65m
*Flange: Tube AD 1/2”,
DN16 ISO-KF, DN 16 CF-R,
8VCR.
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*Absolute pressure measurement, independent of gas type.
*Excellent long-term and temperature stability.
*Minimal zero drift.
*Corrosion-resistant alumina construction.
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Model Number
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Specifications
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Power/Output
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Features
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TPR265/280
Compact Pirani Gauge
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*Temperature controlled: 45℃.
*Range:
5x10-4~1000mbar
*Temp.:
80℃(Bakeout)
5~60℃(Operating)
-20~65℃(Storage)
*Filament: Tungsten
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*Supply: 14~30 VDC. 1.5W
*Output Signal:
2.2~8.5 V (Pressure range)
0.5 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 200m
*Flange: DN16 ISO-KF,
DN 16 CF-R.
*Fitting: 1/8” NPT.
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*Compact and robust.
*Optimum temperature compensation.
*Stable and fasr measuring.
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Model Number
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Specifications
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Power/Output
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Features
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IKR 251/261
Compact Cold Cathode Gauge
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*Range:
2x10-9~1x10-2mbar
*Temp.:
150/250℃(Bakeout)
5~55℃(Operating)
-40~65℃(Storage)
*Seal: FPM or metal
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*Supply: 15~30 VDC. 2 W
*Output Signal:
1.8~8.5 V (Pressure range)
0.5 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 500m
*Flange: DN 25 ISO-KF, DN40 ISO-KF, DN40 CF-F.
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*No filament burn-out – cold ionization.
*Withstands air Inrush.
*Corrosion resistant.
*Operating status display.
*Inverted magnetron.
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Model Number
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Specifications
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Power/Output
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Features
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IKR 270
Compact Cold Cathode Gauge
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*Range:
5x10-11~1x10-2mbar
*Temp.:
250℃(Bakeout)
5~55℃(Operating)
-40~65℃(Storage)
*Seal: metal
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* Supply: 15~30 VDC. 2 W
*Output Signal:
1.8~8.5 V (Pressure range)
0.5 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 500m
*Flange: DN40 CF-F.
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*No filament burn-out – cold ionization.
*Withstands air Inrush.
*Corrosion resistant.
*Operating status display.
*Inverted magnetron.
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Model Number
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Specifications
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Materials
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Features
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IMR 265
Compact Capacitance Diaphragm Gauge
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*Range:
5x10-6~1000 mbar
*Temp.:
150℃(Bakeout)
0~55℃(Operating)
-20~70℃(Storage)
*Flange: DN16/25/40 ISO-KF, DN40 CF-F.
*Pirani measurement element: Copper,tungsten
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* Supply: 20~30 VDC. 16 W
*Output Signal:
1.5~7.5 V
(Ioni Pressure range )
8.5~9.75 V
(Pirani Pressure range )
0.5 V(Sensor error)
10 k0hm (Minimum load)
*Sensor cable length: 100m
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*Ideal for plasma and sputter processes.
*High accuracy, excellent reproducibility.
*Integrated Pirani switches the hot cathode automatically filament protection.
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Model Number
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Specifications
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Power/Output
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Features
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PBR 260
Compact FullRange BA Gauge
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*Range:
5x10-10~1000 mbar
*Temp.:
150℃(Bakeout)
0~50℃(Operating)
-20~70℃(Storage)
*Filament: Tungsten
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* Supply: 20~28 VDC. 16 W
*Output Signal:
0.774~10 V
(Pressure range )
0.5 V(Sensor error below)
10 k0hm (Minimum load)
*Sensor cable length: 100m
*Flange: DN 25/40 ISO-KF,
DN40 CF-R.
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*Hot cathode(BA) with Pirani in one compact housing.
*Bayar Alpert gauges swithched on/off automatically by Pirani gauge.
*One port from atmosphere to UHV.
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Model Number
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Specifications
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Power/Output
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Features
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PKR 251/261
Compact Full Range Gauge
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*Range:
5x10-9~1000mbar
*Temp.:
150℃(Bakeout)
5~55℃(Operating)
-40~65℃(Storage)
*Seal: FPM or metal
*Filament: Tungsten.
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* Supply: 15~30 VDC. 2 W
*Output Signal:
1.8~8.6 V (Pressure range)
0.5 V(Sensor error below)
9.5V(Sensor error above)
10 k0hm (Minimum load)
*Sensor cable length: 300m
*Flange: DN40 CF-F.
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*Two gauges in one housing-cold cathode(Inverted magnetron) and Pirani.
*Corrosion resistant.
*One port from atmosphere to UHV.
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Model Number
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Specifications
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Power/Output
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Features
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Maxi Gauge
TPG 256 A
Display and Control units for compact gauges.
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*Could connections for 6 gauges (max. 3 IMR265/PBR260)
*Range: 5x10-11~55000 mbar.
*Temp.:
5~40℃(Operating)
-20~60℃(Storage)
*Protection: IP30.
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*Supply: 50/60 Hz, 90~250 VAC.
*Output: 0~10 VDC.
*Setpoint: 60 VDC, 3A, 6 pieces.
*Error signal: 60 VDC, 1.5A, 1 piece.
*Interface: RS232C, RS422.
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*Easy to operate.
*Calibration factors for all gases.
*Non-volatile parameter memory.
*Switching functions with relay output.
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Model Number
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Specifications
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Power/Output
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Features
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Single Gauge
TPG 261
Display and Control units for compact gauges.
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* connection for 1 compact gauge.
*Range: 5x10-11~55000 mbar.
*Temp.:
5~50℃(Operating)
-20~60℃(Storage)
*Protection: IP30.
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*Supply: 50/60 Hz, 90~250 VAC.
*Output: 0~10 VDC.
*Setpoint: 60 VAC, 1A, 2 pieces.
*Error signal: 60 V, 1 piece.
*Interface: RS232C
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*Easy to operate.
*Calibration factors for all gases.
*Non-volatile parameter memory.
*Auto diagnostics.
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Model Number
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Specifications
|
Power/Output
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Features
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Single Gauge
TPG 262
Display and Control units for compact gauges.
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* connection for 2 compact gauges.
*Range: 5x10-11~55000 mbar.
*Temp.:
5~50℃(Operating)
-20~60℃(Storage)
*Protection: IP30.
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*Supply: 50/60 Hz, 90~250 VAC.
*Output: 0~10 VDC.
*Setpoint: 60 VAC, 1A, 4 pieces.
*Error signal: 1 piece.
*Interface: RS232C
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*Easy to operate.
*Calibration factors for all gases.
*Non-volatile parameter memory.
*Auto diagnostics.
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